TY - JOUR
AU - Wang, Mingli
AB - This paper reports the multi-layer optics films processed by magnetron sputtering, and investigated the film thickness monitor and the deposition processes control techniques systematically. And successfully makes the coatings of 0.2% reflection in the visible region.
TI - Optics coatings by magnetron sputtering deposition
JF - Proceedings of SPIE
DO - 10.1117/12.300652
DA - 1998-02-20
UR - https://www.deepdyve.com/lp/spie/optics-coatings-by-magnetron-sputtering-deposition-TFfqApIm0z
SP - 130
EP - 132
VL - 3175
IS - 1
DP - DeepDyve
ER -