TY - JOUR
AU - Kenda, Andreas
AB - We have developed compact devices to control electrostatically driven resonant micromirrors with one and two axes. For stable oscillation with large amplitude, operation close to resonance must be ensured under varying environmental conditions. Our devices feature optical position sensing and driver electronics with closed loop control. In this contribution, we present in much detail the novel two-dimensional device and highlight specific aspects of this system.
TI - Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes
JF - Journal of Micro/Nanolithography, MEMS and MOEMS
DO - 10.1117/1.3609230
DA - 2011-07-01
UR - https://www.deepdyve.com/lp/spie/optical-position-encoding-and-phase-control-of-an-electrostatically-T66uX45JIn
SP - 033006
EP - 033006-9
VL - 10
IS - 3
DP - DeepDyve
ER -