TY - JOUR AU1 - MATSUDA,, Tsuyoshi AU2 - KOMODA,, Tsutomu AB - Abstract The estimation of aberration coefficients of objective lens becomes more difficult as decreasing the boie radius and gap of pole-pieces, in particular, at high excitations. Therefore, we have carried out the direct measurement of the aberrations from final electron micrographs, in which a lateral displacement appeares in between the bright and dark field images of crystalline specimens due to the aberrations. It is confirmed from the experiment that the aberrations decrease as increasing the lens excitation IN/Vr ⁠, especially, the spherical aberration coefficient decreases continuously even though the magnetic field strength in the lens gap is almost saturated. The measured values of aberrations do not well coincide with the values calculated on the base of the magnetic field distribution of the lens. This content is only available as a PDF. © Oxford University Press TI - Measurement of Aberration Coefficients of Magnetic Electron Lenses JF - Journal of Electron Microscopy DO - 10.1093/oxfordjournals.jmicro.a049828 DA - 1972-01-01 UR - https://www.deepdyve.com/lp/oxford-university-press/measurement-of-aberration-coefficients-of-magnetic-electron-lenses-ROLuIAJpyr SP - 163 EP - 168 VL - 21 IS - 3 DP - DeepDyve ER -