TY - JOUR
AU - Moisan, frederic
AB - This optimisation method is based on the well-known effect of reflectance variation as a function of wavelength, for thin film structures. Wavelength spectra acquisition for the various structures are basic data of an adapted wavelength filter calculation. Both this calculation and an original optical apparatus allow implementation in a fully automated integrated circuits inspection machine. We present photometric measurements attesting of method reliability, and final inspection results on images with defects, showing improvement that contrast optimisation can bring.
TI - Optical Optimisation Of Image Contrast Using Real-Time Spectrometry ; Application To In-Process Integrated Circuits Inspection
JO - Proceedings of SPIE
DO - 10.1117/12.949247
DA - 1989-02-15
UR - https://www.deepdyve.com/lp/spie/optical-optimisation-of-image-contrast-using-real-time-spectrometry-RLP1t6yafE
SP - 179
EP - 185
VL - 1010
IS - 
DP - DeepDyve
ER -