TY - JOUR
AU1 - Zhang, Yuliang
AU2 - Ma, Tao
AU3 - Peng, Mingjie
AB - The Chromatic Confocal Displacement Sensor, with its capacity to avoid damage to the measured surface and achieve high measurement accuracy, has been widely used in many fields such as advanced manufacturing, biomedical, aerospace, and more. The dispersive objective lens is a core component of the chromatic confocal sensor, with its optical properties directly determining the system's measurement performance. To achieve real-time dynamic error separation in dynamic measurement scenarios and ensure high-precision measurement, a dual-channel common optical path structure is proposed. In dual-channel mode, the paths of the two measurement points are the same, and the information obtained about the object is consistent, with only the relative phase delay related to the distance from the two measurement points. By subtracting the two sets of data and fitting the error, real-time dynamic error can be obtained. Using ZEMAX optical design software, a linear dispersive objective lens composed of eight full-sphere lenses was designed. The design results indicate that the system operates in the wavelength range of 500-800nm, with the image numerical aperture greater than 0.68, a working distance greater than 7mm, and axial dispersion exceeding 100m. Using the least squares method, linear regression calculations were performed on the dispersion-wavelength linearity, yielding a linear determination coefficient R2=0.9989, indicating an excellent linear relationship.
TI - Design of dual-channel common optical path dispersive objective lens
JF - Proceedings of SPIE
DO - 10.1117/12.3034502
DA - 2024-11-27
UR - https://www.deepdyve.com/lp/spie/design-of-dual-channel-common-optical-path-dispersive-objective-lens-RDplIL68ar
SP - 132370Z
EP - 132370Z-7
VL - 13237
IS - 
DP - DeepDyve
ER -