TY - JOUR
AU - Papernov, Semyon
AB - Post-mortem atomic force mocroscopy (AFM) analysis of 1 micrometers thick, monolayer, delectric coatings of HfO 2 , Y 2 O 3 , and Ta 2 O 5 , all prepared by conventional e-beam deposition, was carried out on irradiated sites of moderate-level damage after 1054-nm irradiation by identical laser pulses. Analysis of all maps shows that growth nodules, long believed to be the prime laser-damage drivers, are few in all of our films and are irrelevant to damage here. Damage morphology was represented by micrometer-scale craters and domes. Crater sizes and depths, linked to the sizes and positions of absorbing defects in the film media, indicate that average absorber size increases from HfO 2 to Y 2 O 3 to Ta 2 O 5 . HFO 2 also has the shallowest craters, while Ta 2 O 5 samples consistently damage near the film- substrate interface, with yttria falling in between these extremes. Crater cross sections reveal a predominance of conical wall formations, pointing towards a thermal- explosion mechanism of crater formation. Domes that were found to be entirely absent in Ta 2 O 5 , occur with approximately 2% probablility in Y 2 O 3 , i.e., 2% of all mapped defects were domes with more than 25% probablility in HfO 2 films. Obtained results suggest that domes are crater precursors, i.e., arrested damage events because of lack of sufficient energy transfer from the absorbing inclusion.
TI - Comparison of laser-induced damage morphology in three model thin-film systems: HfO 2 , Y 2 O 3 , and Ta 2 O 5
JF - Proceedings of SPIE
DO - 10.1117/12.213756
DA - 1995-07-14
UR - https://www.deepdyve.com/lp/spie/comparison-of-laser-induced-damage-morphology-in-three-model-thin-film-Qgw3pyu7D7
SP - 385
EP - 396
VL - 2428
IS - 1
DP - DeepDyve
ER -