TY - JOUR
AU - Chen, Ri-Hong
AB - Conventional ionic polymermetal composite (IPMC) production cuts individual transducers from bulk IPMC sheets. This paper presents a novel photolithographic technique that grows a large array of identical devices on a thin (µm range) parylene diaphragm supported on a perforated substrate of material that is immune to the subsequent processing liquids. In particular, the new technique relies on a unique wax fill-up and removal concept that can produce arbitrarily shaped Nafion films with micron feature size. The developed process is cheap and results in devices of high uniformity and reliability, with greater design flexibility. Microtensile testing characterizes the fracture profiles of the non-electroded Nafion film and IPMC. Young's modulus is characterized, as well as maximum displacement and current consumption under various loading, driving voltages, waveforms and frequencies. High product quality and low process costs make this process of interest for mass production of micromachined IPMC transducers.
TI - Improved cost-effective fabrication of arbitrarily shaped IPMC transducers
JF - Journal of Micromechanics and Microengineering
DO - 10.1088/0960-1317/18/1/015016
DA - 2008-01-01
UR - https://www.deepdyve.com/lp/iop-publishing/improved-cost-effective-fabrication-of-arbitrarily-shaped-ipmc-QbFY1b0y3P
SP - 015016
VL - 18
IS - 1
DP - DeepDyve
ER -