TY - JOUR AU - Pearce, C. G. AB - This paper describes the design and development of a time of flight fast atom/ion scattering spectrometer. The instrument allows sample irradiation with a monoenergetic pulsed beam of either atoms or ions and energy and intensity analysis of scattered atoms or ions simultaneously or separately. In addition, primary incident, scattered exit, azimuthal and scattering angles may all be varied independently. For surface analysis this instrument promises to overcome many of the problems associated with conventional LEISS. In addition, greatly improved fundamental understanding of surface charge exchange mechanisms is possible through measurements unique to the instrument. In this paper we give details of the instrument, summarize its capabilities and discuss its potential for future fundamental and practical investigations. TI - The design and development of a time of flight fast atom/ion scattering spectrometer JF - Surface and Interface Analysis DO - 10.1002/sia.7402201122 DA - 1994-07-01 UR - https://www.deepdyve.com/lp/wiley/the-design-and-development-of-a-time-of-flight-fast-atom-ion-QDKkGwzFPf SP - 576 EP - 580 VL - 22 IS - 1‐12 DP - DeepDyve ER -