TY - JOUR
AU - Lin, Chi-Ying
AB - This paper presents digital motion control algorithms, real-time implementation, and experimental results for dynamic motion control. A digital control system that includes robust feedback, previewed feedforward, and repetitive control action is implemented on a piezoelectric actuator driven mechanical stage and is demonstrated to achieve nanometer level dynamic precision.
TI - Nano-precision dynamic motion control
JF - Proceedings of SPIE
DO - 10.1117/12.738689
DA - 2007-09-13
UR - https://www.deepdyve.com/lp/spie/nano-precision-dynamic-motion-control-PciFjuUhR2
SP - 66480H
EP - 66480H-8
VL - 6648
IS - 1
DP - DeepDyve
ER -