TY - JOUR
AU - Yang, Haigang
AB - This paper presents an electromechanical closed-loop interface for the high performance capacitive micro-accelerometer. To overcome the problem that the linearity of the traditional analogue force feedback scheme is sensitive to the mismatch in the MEMS transducer, a pulse-width-modulation (PWM) force feedback method is developed in this paper. Elaborate non-linearity analysis of the PWM force feedback and a comparison with traditional analog feedback method is presented. A prototype interface circuit is designed and fabricated in a standard 0.35 μm CMOS process which measures 6.25 mm2. The noise floor of the system is 10 μg/√Hz and the signal bandwidth is 1.2 kHz, respectively. The system shows a DC nonlinearity of 1.6‰ without extra linearization circuit with an input range of ± 1.4 g when interface to a commercial accelerometer device.
TI - A closed-loop interface for capacitive micro-accelerometers with pulse-width-modulation force feedback
JF - Analog Integrated Circuits and Signal Processing
DO - 10.1007/s10470-017-1064-6
DA - 2017-11-06
UR - https://www.deepdyve.com/lp/springer-journals/a-closed-loop-interface-for-capacitive-micro-accelerometers-with-pulse-NSBe7LeQ4G
SP - 195
EP - 204
VL - 94
IS - 2
DP - DeepDyve
ER -