TY - JOUR
AU - Bierden, P. A.
AB - MEMS deformable mirrors with thousands of actuators are under development for space-based operation, which require fault tolerant actuators that will not fail due to electrical overstress. We report on advances made in the development of MEMS deformable mirror actuators with enhanced reliability for space-based, high-contrast imaging instrumentation that eliminate irreversible actuator damage resulting from snap-through.
TI - MEMS deformable mirror actuators with enhanced reliability
JO - Proceedings of SPIE
DO - 10.1117/12.910742
DA - 2012-01-24
UR - https://www.deepdyve.com/lp/spie/mems-deformable-mirror-actuators-with-enhanced-reliability-LehanoJv40
SP - 825306
EP - 825306-7
VL - 8253
IS - 1
DP - DeepDyve
ER -