TY - JOUR
AU1 - Shirazi, Muhammad Faizan
AU2 - Wijesinghe, Ruchire Eranga
AU3 - Ravichandran, Naresh Kumar
AU4 - Kim, Pilun
AU5 - Jeon, Mansik
AU6 - Kim, Jeehyun
AB - The conventional Fourier domain optical coherence tomography system requires single scanner for two dimensional cross-sectional image and two scanners for volumetric image. Parallel spectral domain optical coherence tomography has advantage of single scanner for volumetric image, while two dimensional cross-sectional images are obtained by parallel acquisition of illuminated line on sample using area camera. In this study, the industrial inspection of optical thin film on touch screen panels was demonstrated using parallel spectral domain optical coherence tomography. The cross-sectional and volumetric images were acquired to detect the internal sub layer defects in optical thin film which are difficult to observe using visual or machine vision based inspection methods. The results indicate the possible application of the proposed system in touch screen panels inspection for quality assurance of product at consumer end.
TI - Optical thin film inspection using parallel spectral domain optical coherence tomography
JF - Proceedings of SPIE
DO - 10.1117/12.2267395
DA - 2017-04-19
UR - https://www.deepdyve.com/lp/spie/optical-thin-film-inspection-using-parallel-spectral-domain-optical-LdGc1ilfAj
SP - 103238V
EP - 103238V-4
VL - 10323
IS - 
DP - DeepDyve
ER -