TY - JOUR
AU - Tavousi, Pouya
AB - For over four decades, Laser-Induced Breakdown Spectroscopy (LIBS), also known as Laser-Induced Plasma Spectroscopy (LIPS), has been a prominent technique for material characterization. A key advantage of LIBS over established methods such as Energy Dispersive x-ray Spectroscopy (EDS), X-Ray Diffraction (XRD), and X-ray Photoelectron Spectroscopy (XPS) is its ability to perform both laser ablation and spectroscopic analysis within a single integrated system. This dual functionality not only reduces the need for additional equipment but also significantly decreases the overall analysis time. Traditional approaches to creating three-dimensional (3D) spatial maps of material composition typically involve sequential delayering and imaging processes, followed by time-consuming segmentation steps that are often manual or reliant on extensive image processing and machine learning algorithms. In this work, we introduce a novel methodology that harnesses LIBS during the machining process to enable real-time material composition mapping. By synchronizing LIBS spectral data with precise laser scanning positions, we are able to generate segmented 3D compositional images on-the-fly, thereby streamlining the workflow and eliminating the need for post-processing. Additionally, through a series of experiments and the evaluation of various cleaning techniques, we identified optimal laser parameters that produce robust LIBS signals while minimizing surface defects. Our approach was validated using samples with known geometries and compositions, yielding promising results that demonstrate the potential of this integrated LIBS-based system for efficient and accurate material characterization. 
TI - Laser-induced breakdown spectroscopy for real-time 3D material composition mapping
JF - Proceedings of SPIE
DO - 10.1117/12.3040528
DA - 2025-03-19
UR - https://www.deepdyve.com/lp/spie/laser-induced-breakdown-spectroscopy-for-real-time-3d-material-KTiFKcXcKy
SP - 133530A
EP - 133530A-12
VL - 13353
IS - 
DP - DeepDyve
ER -