TY - JOUR
AU - Quack, Niels
AB - We present the concept and detailed design of a Smart Slit Assembly for next generation spectrometers, and we experimentally demonstrate operation of an individual 221 m  111 m smart slit channel employing a MEMS actuated shutter to continuously modulate the intensity of the optical input signal. The MEMS actuated shutter is fabricated in a 211 m thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow an absolute displacement of 52 m at 74 V, resulting in a continuously tunable shutter efficiency of up to 99.97% at an operating wavelength of 532 nm.
TI - Smart slit assembly employing continuously tunable MEMS shutter
JF - Proceedings of SPIE
DO - 10.1117/12.2583149
DA - 2021-03-05
UR - https://www.deepdyve.com/lp/spie/smart-slit-assembly-employing-continuously-tunable-mems-shutter-KJRIRyCFo4
SP - 116970P
EP - 116970P-8
VL - 11697
IS - 
DP - DeepDyve
ER -