TY - JOUR
AU - Poutous, Menelaos K.
AB - Deterministic illumination diffractive-diffusers have non-periodic short and medium scale topography. Because of the quasi-randomized locations and vertical sidewalls at phase transition boundaries, over-coating diffractive diffusers with thin film antireflection layers perturbs their function, resulting in illumination performance deviations and nonuniformities. To mitigate these effects, we added anti-reflection random nano-structures (rARSS) on the surface of three different classes of fused-silica multi-phase diffractive diffusers, using reactive-ion plasma etching. The diffusers were measured before and after the random nanostructure addition, using a polarized-laser scatterometer with a dynamic range of nine orders-of-magnitude. The bi-directional scatter distribution function (BSDF) was measured over the entire equatorial plane of incidence, to analyze the directionality of scattered light, and the impact of the rARSS on the optical performance of the diffusers. An overall Fresnel reflectivity suppression was measured in the directional illumination patterns, as well as, across the entire 180 angle-sweep. The designed deterministic illumination distribution patterns and contrast were unaffected by the presence of the rARSS.
TI - Random anti-reflection subwavelength surface structures on deterministic illumination diffusers
JF - Proceedings of SPIE
DO - 10.1117/12.2577040
DA - 2021-03-05
UR - https://www.deepdyve.com/lp/spie/random-anti-reflection-subwavelength-surface-structures-on-KC97aAacdU
SP - 1169416
EP - 1169416-6
VL - 11694
IS - 
DP - DeepDyve
ER -