TY - JOUR AU - Ko, Jong Soo AB - In this research, an accelerometer with an over-range stopper was designed, fabricated and evaluated. When a shock beyond the sensing range is applied to an acceleration sensor, an over-range stopper limits the amount of longitudinal deformation in the sensing bridge, which is weak to shocks, below a certain level and so prevents the acceleration sensor from breaking. To analyze the effect of the overrange stopper shape on acceleration sensor performance, we fabricated high-shock accelerometers with over-range stoppers of three different lengths (short, medium and long models). We then performed a comparative analysis of the performance of each accelerometer. TI - High-shock silicon accelerometer with an over-range stopper JO - Journal of Mechanical Science and Technology DO - 10.1007/s12206-016-0338-8 DA - 2016-04-01 UR - https://www.deepdyve.com/lp/springer-journals/high-shock-silicon-accelerometer-with-an-over-range-stopper-Jrd0zJMH0S SP - 1817 EP - 1824 VL - 30 IS - 4 DP - DeepDyve ER -