TY - JOUR
AU - Braeuer, Guenter
AB - Static sputter processes for the mass production of 5.25" magneto-optical data storage media have been developed. Such single disk processes require a discontinuous operation of circular magnetron cathodes in nonreactive and reactive gas atmospheres. Magnetron field configurations based on specially shaped rotating magnet patterns allow to meet high uniformity criteria for optical and magnetic properties of the individual layers using 210 mm targets and an integrated inner/outer diameter disk masking. The processes have been integrated into avery compact 'circular path coater' which realizes a throughput of 180 disks/hour. Experimental results of the process development for SiN and TbEeCo thin films are presented.
TI - Production of magneto-optical data storage media by static DC sputter processes
JF - Proceedings of SPIE
DO - 10.1117/12.22382
DA - 1990-12-01
UR - https://www.deepdyve.com/lp/spie/production-of-magneto-optical-data-storage-media-by-static-dc-sputter-JapEyuYqnB
SP - 151
EP - 161
VL - 1323
IS - 1
DP - DeepDyve
ER -