TY - JOUR AU - Mehregany, M AB - This paper presents results from step-transient measurements on salient-pole, side-drive, polysilicon micromotors operated in different viscosity silicone lubricating oils under different temperatures and excitation voltages. The step transient has been found to be overdamped, with the rise time decreasing with decreasing viscosity of the oil. The rise time, which is in the range of 1 to 20 msec, is around one to two orders of magnitude larger in oil than that in gaseous environments because of the larger viscous drag contribution. In oil, voltages as low as 12 V across 2.5 mu m rotor/stator gaps are sufficient to operate the micromotors. Micromotor speeds up to 12500 rpm are achieved with 110 V excitations across 1.5 mu m rotor/stator gaps. Based on the experimental findings, a model for micromotor dynamics in lubricating oils is examined in which the Coulomb frictional torque is neglected, since micromotor operation in oil is dominated by viscous drag. TI - Micromotor dynamics in lubricating fluids JF - Journal of Micromechanics and Microengineering DO - 10.1088/0960-1317/4/4/011 DA - 1994-12-01 UR - https://www.deepdyve.com/lp/iop-publishing/micromotor-dynamics-in-lubricating-fluids-JAtp4ZHZDE SP - 266 VL - 4 IS - 4 DP - DeepDyve ER -