TY - JOUR
AU - Noworolski, J. Mark
AB - We present the concept of utilizing micro-electromechanical (MEM) energy storage for power conversion. A capacitor and inductor-free step-up converter based on mechanical resonance and silicon strain energy is introduced. In this circuit, a single MEM device is used to generate and supply high voltages, suitable for driving other MEM devices. A test converter using vertical polysilicon based resonators as energy storage elements is fabricated and tested, demonstrating the basic step-up function.
TI - Microresonant devices for power conversion
JO - Proceedings of SPIE
DO - 10.1117/12.323897
DA - 1998-09-08
UR - https://www.deepdyve.com/lp/spie/microresonant-devices-for-power-conversion-INxBARSefT
SP - 260
EP - 265
VL - 3514
IS - 1
DP - DeepDyve
ER -