TY - JOUR
AU - Yeom, Geun Young
AB - An energy-resolved quadrupole mass spectrometer is used to investigate the time-averaged ion energy distribution (IED) of positive ionic species in an Ar/CF4 (90%/10%) discharge produced by dual-frequency–dual-antenna, next-generation large-area inductively coupled plasma source. The operating pressure is 10 mTorr. Two radio frequencies of 2 MHz (low frequency) and 13.56 MHz (high frequency) are used to initiate and sustain the discharge. The orifice of the mass spectrometer was 100 µm in diameter and placed at 30 mm below the ICP source and 20 mm outside the discharge volume.It is observed that both of the frequencies have significant effect on IEDs of all prominent discharge species. The evolution of IEDs with power shows that the discharge undergoes a mode transition (E to H) as the applied power is increased. At a fixed value of P13.56 MHz (250 and 500 W), the energy spread and the energy separation between two peaks of IEDs increase illustrating enhanced E-mode. Above P13.56 MHz = 500 W, the IEDs show opposite trends, i.e. decreasing energy spread and energy separation between two peaks, showing the strengthening of H-mode. Increasing P13.56 MHz at a fixed value of P2 MHz has similar effects. A comparison of IEDs sampled at a fixed total power (P13.56 MHz + P2 MHz) demonstrates that an IED can be tailored by changing the power ratio (P13.56 MHz/P2 MHz).
TI - Mass spectrometric study of discharges produced by a large-area dual-frequency–dual-antenna inductively coupled plasma source
JF - Journal of Physics D: Applied Physics
DO - 10.1088/0022-3727/45/47/475201
DA - 2012-11-28
UR - https://www.deepdyve.com/lp/iop-publishing/mass-spectrometric-study-of-discharges-produced-by-a-large-area-dual-HoXQzIaGx1
SP - 475201
VL - 45
IS - 47
DP - DeepDyve
ER -