TY - JOUR
AU - Bader, S. D.
AB - A method of controlling the coordinate sensitivity in a high temperature superconducting microbolometer is described. A laser beam, precisely focused on the patterned superconducting structure, was used to nucleate a resistive area that is sensitive to external thermal effects. The electron beam lithography and wet chemical etching were applied as pattern transfer processes in epitaxial Y-Ba-Cu-O films. Two different sensor designs were tested: (i) 3 millimeters long and 40 micrometers wide stripe and (ii) 1.25 millimeters long, and 50 micron wide meander -like structure. It is shown experimentally that scanning the laser beam along the stripe leads to physical displacement of the sensitive area and, therefore may be used as a basis for imaging over a broad spectral range. Our approach, by which the coordinate sensitivity of a microfabricated superconducting stripe is controlled, is an alternative solution to Focal Plane Array (FPA) design. For example, patterning the superconducting film into a meander structure is equivalent to a two-dimensional detector array. In additional to the simplicity of the detector fabrication sequence (one step mask transfer), a clear advantage of this approach is the simplicity of the read-out process: an image is formed by registering the signal with only two electrical terminals. The proposed approach can be extended for imaging over a wide spectral range; the limiting factor is the wavelength-dependent efficiency of thermal conversion in the film/substrate system.
TI - Superconducting microbolometer with controllable coordinate sensitivity: an alternative approach to FPA design
JF - Proceedings of SPIE
DO - 10.1117/12.603647
DA - 2005-05-31
UR - https://www.deepdyve.com/lp/spie/superconducting-microbolometer-with-controllable-coordinate-Hjv5MC0dEk
SP - 967
EP - 973
VL - 5783
IS - 1
DP - DeepDyve
ER -