TY - JOUR
AU - Yang, Lixia
AB - A new structure of Si x N y thin film transverse thermal conductivity measuring by comparative method is introduced. And by using finite element software ANSYS we emulated the effect to thermal distribution by the factors of heatpower, length & width of suspending beam, and the thermal conductivity. This method, with no limitation of measuring in vacuum, is simply structured and easily operated.
TI - Design and simulation of comparative method for testing transverse thermal conductivity of Si x N y thin film
JF - Proceedings of SPIE
DO - 10.1117/12.837586
DA - 2009-11-04
UR - https://www.deepdyve.com/lp/spie/design-and-simulation-of-comparative-method-for-testing-transverse-FzuaoKXMtQ
SP - 751114
EP - 751114-9
VL - 7511
IS - 1
DP - DeepDyve
ER -