TY - JOUR AU1 - Halfmann, H AU2 - Bibinov, N AU3 - Wunderlich, J AU4 - Awakowicz, P AB - A double inductively coupled low pressure plasma for sterilization of bio-medical materials is introduced. It is developed for homogeneous treatment of three-dimensional objects. The short treatment times and low temperatures allow the sterilization of heat sensitive materials like ultra-high-molecular-weight-polyethylene or polyvinyl chloride. Using a non-toxic atmosphere reduces the total process time in comparision with common methods. Langmuir probe measurements are presented to show the difference between ICP- and CCP-mode discharges, the spatial homogeneity and the influence on the sterilization efficiency. To know more about the sterilization mechanisms optical emission is measured and correlated with sterilization results. TI - A double inductively coupled plasma for sterilization of medical devices JF - Journal of Physics D: Applied Physics DO - 10.1088/0022-3727/40/14/008 DA - 2007-07-21 UR - https://www.deepdyve.com/lp/iop-publishing/a-double-inductively-coupled-plasma-for-sterilization-of-medical-DQb0X7nrc8 SP - 4145 VL - 40 IS - 14 DP - DeepDyve ER -