TY - JOUR
AU1 - Wu, Zhijiang
AU2 - Song, Chenfei
AU3 - Guo, Jian
AU4 - Yu, Bingjun
AU5 - Qian, Linmao
AB - Abstract A novel multi-probe micro-fabrication apparatus was developed based on the friction-induced fabrication method. The main parts of the apparatus include actuating device, loading system, and control system. With a motorized XY linear stage, the maximum fabrication area of 50 mm × 50 mm can be achieved, and the maximum sliding speed of probes can be as high as 10 mm/s. Through locating steel micro balls into indents array, the preparation of multi-probe array can be realized by a simple and low-cost way. The cantilever was designed as a structure of deformable parallelogram with two beams, by which the fabrication force can be precisely controlled. Combining the friction-induced scanning with selective etching in KOH solution, various micro-patterns were fabricated on Si(100) surface without any masks or exposure. As a low-cost and high efficiency fabrication device, the multi-probe micro-fabrication apparatus may encourage the development of friction-induced fabrication method and shed new light on the texture engineering.
TI - A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method
JF - "Frontiers of Mechanical Engineering"
DO - 10.1007/s11465-013-0276-4
DA - 2013-12-01
UR - https://www.deepdyve.com/lp/springer-journals/a-multi-probe-micro-fabrication-apparatus-based-on-the-friction-DFeidW5oqx
SP - 333
EP - 339
VL - 8
IS - 4
DP - DeepDyve
ER -