TY - JOUR AU - Chubich, D. A. AB - Three-dimensional optical connectors for connecting planar waveguides made of silicon are created via direct laser writing. The morphology and optical properties of the resulting structures are compared. Hybrid three-dimensional optical connectors can be used to transmit the light from effective sources of single photons based on colloidal quantum dots and substituted nitrogen and silicon vacancies (NV and Si centers) in diamond, which can be incorporated into a polymer printed wiring board during its manufacture, to planar waveguides for subsequent use in photonic integrated circuits. TI - Three-Dimensional Optical Lithography and Nanoscale Optical Connectors JF - Bulletin of the Russian Academy of Sciences: Physics DO - 10.3103/S1062873820070321 DA - 2020-07-20 UR - https://www.deepdyve.com/lp/springer-journals/three-dimensional-optical-lithography-and-nanoscale-optical-connectors-D1MEjOrlVG SP - 760 EP - 765 VL - 84 IS - 7 DP - DeepDyve ER -