TY - JOUR
AU - Lee, Ping
AB - Recent advances in thin film fabrication techniques have made metal multilayer mirrors an important new addition in the field of soft x-ray diffraction optics. A metal multilayer is one dimensional periodic structure which consists of an alternating sequence of high/low atomic number elements evaporated or sputtered onto a substrate. Characterization of these devices have been carried out on a variety of x-ray sources, including synchrotron radiation, over a large range of parameters. Extensive modelling of the diffraction characteristics of multilayers has shown that the theory of optics of thin film gives good agreement between measured and calculated diffraction profiles. Application of metal multilayer mirrors as normal incidence x-ray collectors, monochromators and beam splitters is being explored.
TI - Soft X-Ray Optics Using Metal Multilayer Mirrors
JF - Proceedings of SPIE
DO - 10.1117/12.966229
DA - 1984-05-23
UR - https://www.deepdyve.com/lp/spie/soft-x-ray-optics-using-metal-multilayer-mirrors-C5t7PEl2N0
SP - 73
EP - 79
VL - 464
IS - 
DP - DeepDyve
ER -