TY - JOUR
AU1 - Miyazawa, Wataru
AU2 - Tada, Shigekazu
AU3 - Ito, Kohichi
AU4 - Saito, Hironori
AU5 - Den, Shoji
AU6 - Hayashi, Yuzo
AU7 - Okamoto, Yukio
AU8 - Sakamoto, Yuichi
AB - This paper describes an improved large-diameter electron cyclotron resonance (ECR) source which employs a strip-bar antenna. By launching a 2.45 GHz microwave near the magnetic field of permanent magnets of alternative polarity set along closed loops, an ECR plasma is produced. The source diameter is 30 cm. The characteristics of an oxygen plasma produced with this modified source are an electron density of , electron temperature of 3 eV and space potential with respect to the chamber wall of less than 20 V. A high plasma density of uniformity within % over 30 cm is achieved.
TI - A large-area ECR processing plasma 
JF - Plasma Sources Science and Technology
DO - 10.1088/0963-0252/5/2/021
DA - 1999-01-01
UR - https://www.deepdyve.com/lp/iop-publishing/a-large-area-ecr-processing-plasma-BTAgJP9HUc
SP - 265
EP - 267
VL - 5
IS - 2
DP - DeepDyve
ER -