TY - JOUR
AU - Noble, J St
AB - A versatile all metal sealed bakeable high energy direct recording electron diffraction system has been constructed. It is designed to observe continuously the growth of thin vapour deposited films in the pressure range from 10 mtorr to 1 ntorr on to both reflection and transmission substrates using electrons of up to 50 kv. The instrument has been designed to fulfil all the required conditions of versatility, vacuum, accuracy, simplicity, ease of construction and operation, and includes a number of novel features including an ultra-high vacuum specimen holder and airlock, totally enclosed magnetic lens and scanning coil assemblies, and a bakeable electron gun and energy filter.
TI - A versatile high energy scanning electron diffraction system for observing thin film growth in ultra-high vacuum and in a low gas pressure
JF - Journal of Physics E: Scientific Instruments
DO - 10.1088/0022-3735/2/7/308
DA - 1969-07-01
UR - https://www.deepdyve.com/lp/iop-publishing/a-versatile-high-energy-scanning-electron-diffraction-system-for-AtQLOXTEqU
SP - 587
VL - 2
IS - 7
DP - DeepDyve
ER -