TY - JOUR
AU - Hillmer, Hartmut
AB - In this article we will generalize and analyze different self-aligned techniques for different stripe lasers, for example: ridge waveguide lasers, buried heterostructure stripe lasers, mushroom-stripe lasers, etc. Finally, a novel self-aligned processing technique for fabricating buried mushroom-stripe lasers is proposed and it has been utilized successfully in fabricating bent waveguide mushroom-stripe MQW DFB lasers.
TI - Self-aligned processing techniques for semiconductor stripe lasers
JF - Proceedings of SPIE
DO - 10.1117/12.251900
DA - 1996-09-24
UR - https://www.deepdyve.com/lp/spie/self-aligned-processing-techniques-for-semiconductor-stripe-lasers-9Y3XN0JjzM
SP - 25
EP - 33
VL - 2886
IS - 1
DP - DeepDyve
ER -