TY - JOUR
AU - Hembd-Soellner, Christian
AB - Binary diffractive optical elements for beam diagnostics have been calculated and fabricated as reflective phase elements in copper. Our calculation combines electromagnetic theory and Fourier optics for coding phase and amplitude in the diagnostic beam. First the binary structure is fabricated in photoresist. Then a galvanic process is used to transfer these structures in copper. By including spatial filters in the design of the element a compact sensor for beam position is achieved.
TI - Binary diffractive elements for CO 2 laser beam diagnostics
JF - Proceedings of SPIE
DO - 10.1117/12.246791
DA - 1996-08-19
UR - https://www.deepdyve.com/lp/spie/binary-diffractive-elements-for-co-2-laser-beam-diagnostics-93R0sNHU2m
SP - 549
EP - 556
VL - 2775
IS - 1
DP - DeepDyve
ER -