TY - JOUR
AU - Zavyalova, Ludmila V.
AB - Here we report the results of working out an original, simple in control and not requiring expensive equipment MOCVD-method for depositing films of semiconductor compounds A 2 B 6 . Dithiocarbamates (DTC) are used as starting materials. The compounds are stable, easily synthesized, cheap and low toxic. Atoms of metal and sulfur in the DTC are strongly bonded. The DTC could be easily dissolved in various organic solvents. The experimental unit for film deposition comprises a spraying apparatus, a substrate heater, and a quartz cylinder for separation of a reaction zone from ambience. The process of film deposition is carried out in air conditions. Films of CdS, bright-yellow, transparent, having mirror smooth surface at thickness less than 2 mkm and rough surface at thickness 8-12 mkm, were deposited by spraying cadmium dithiocarbamate, that is DTC with radical C 2 H 5 , solution in pyridine on substrates heated to 240-280 degrees C. Deposition rate was 60-90 nm/min. Films obtained were of hexagonal modification, polycrystalline, textured, with low, at the level of centipercents content of oxygen and carbon. Slit type photodetectors based on CdS and CdS 1-x Se x of 1.0 mkm thickness have dark conductivity (sigma) d equals 10 -9 divided by 10 -8 Ohm -1 cm -1 and photoconductivity (sigma) ph equals 10 -2 divided by 10 -1 Ohm -1 cm -1 at 200 lux. Industrially suitable technology for production of photopotentiometer on the base of these films was developed. Sandwich-type photodetectors In 2 S 3 - CdS: Cu, Cl - In with 8-12 mkm thickness have the same value of photoconductivity and the light-to-dark ratio is 10 6 divided by 10 7 . Based on sandwich-type photodetectors, a hybrid structure of pyroelectric-photodetector as a resonant-type coordinate-sensitive detector was developed.
TI - Photodetectors of slit and sandwich types based on CdS and CdS 1-x Se x films obtained using MOCVD method from dithiocarbamates
JF - Proceedings of SPIE
DO - 10.1117/12.271194
DA - 1997-04-15
UR - https://www.deepdyve.com/lp/spie/photodetectors-of-slit-and-sandwich-types-based-on-cds-and-cds-1-x-se-8cRC01CwdO
SP - 235
EP - 242
VL - 2999
IS - 1
DP - DeepDyve
ER -