TY - JOUR AU - TI - Measuring Method for TSV-based Interconnect Resistance in 3D-SIC by Embedded Analog Boundary-Scan Circuit JF - Transactions of The Japan Institute of Electronics Packaging DO - 10.5104/jiepeng.7.140 DA - 2014-01-01 UR - https://www.deepdyve.com/lp/unpaywall/measuring-method-for-tsv-based-interconnect-resistance-in-3d-sic-by-8FkzR4jkkb DP - DeepDyve ER -