TY - JOUR
AU - Nakata, Yoshiki
AB - Photo-lithographical laser ablation was demonstrated by laser ablation using a femtosecond laser system with a lithographic optical system. Among them, laser beam passed through a mask and the pattern was imaged on the film by a pair of convex lenses. As a result, the film was lithographically ablated, and micron-sized patterns were generated in a single shot. Fringes were generated outside the ablated patterns with defocusing or larger laser fluence. The resolution of generation was 13 ॖm, and the narrowest width of a generated line was about 4 ॖm. In addition, transmission gratings were used instead of a mask, and nano-sized periodic structures were generated.
TI - Lithographic fabrication of microstructures by laser ablation using femtosecond laser
JF - Proceedings of SPIE
DO - 10.1117/12.552809
DA - 2004-04-02
UR - https://www.deepdyve.com/lp/spie/lithographic-fabrication-of-microstructures-by-laser-ablation-using-8ElTiVsK0C
SP - 147
EP - 155
VL - 5399
IS - 1
DP - DeepDyve
ER -