TY - JOUR
AU1 - Utsugi, Koji
AU2 - Tamegai, Masashi
AU3 - Hasegawa, Etsuo
AB - In order to form high‐resolusion pixels for a small organic elctroluminescent (EL) device having a three‐color independent emission system using a low molecular evaporation method, a metal mask sliding control system with a pulse control motor was made for the initial trials. This system has a substrate holding table which has the functions of rotation angle adjustment, adjustment of the XY direction movements, adjustment of the Z direction movements and an XY stage for a metal mask sliding which is based on the leaf spring structure. The patterning of the RGB thin films was done by precisely controlling the position of the XY stage for a metal mask sliding using a DC servomotor. An organic EL device, which has the sub‐pixel pitch of 33 μm × 100 μm, aperture ratio of 70% and 254 ppi (pixel/inch), has been manufactured using this system.
TI - P‐30: Fine Patterning of Lateral Three Color Emitters for Organic EL Devices Using a Metal Mask Sliding in Vacuum Vapor Deposition
JF - Sid Symposium Digest of Technical Papers
DO - 10.1889/1.1833028
DA - 2000-05-01
UR - https://www.deepdyve.com/lp/wiley/p-30-fine-patterning-of-lateral-three-color-emitters-for-organic-el-7qsCbQUOSv
SP - 640
VL - 31
IS - 1
DP - DeepDyve
ER -