TY - JOUR AU1 - Biswas, D. R. AU2 - Ghosh, C. AU3 - Layman, R. L. AB - not Available. TI - Vapor Phase Deposition of Aluminum Film on Quartz Substrate JF - Journal of the Electrochemical Society DO - 10.1149/1.2119669 DA - 1983-01-01 UR - https://www.deepdyve.com/lp/iop-publishing/vapor-phase-deposition-of-aluminum-film-on-quartz-substrate-7PtJaAlMnv SP - 234 EP - 236 VL - 130 IS - 1 DP - DeepDyve ER -