TY - JOUR
AU - Wu, Ming C
AB - In this paper, we perform the experimental characterization of two-axis MEMS scanners driven by radial vertical combdrive actuators. The dc scan ranges are limited by the pull-in effect. Each scanner utilizes a cross-bar spring structure to achieve two rotational degrees of freedom (DOFs) without employing any gimbal. Both the actuators and torsion springs are hidden underneath the mirror to obtain a small form factor. The devices are fabricated by a five-layer polysilicon surface micromachining process (SUMMiT-V). Devices with different combinations of parameter values are experimentally characterized and compared.
TI - Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures
JF - Journal of Micromechanics and Microengineering
DO - 10.1088/0960-1317/19/4/045002
DA - 2009-04-01
UR - https://www.deepdyve.com/lp/iop-publishing/experimental-characterization-of-two-axis-mems-scanners-with-hidden-69VabAoMma
SP - 045002
VL - 19
IS - 4
DP - DeepDyve
ER -