TY - JOUR
AU1 - Chen, Weiwu
AU2 - Kirihara, Soshu
AU3 - Miyamoto, Yoshinari
AB - Dense three‐dimensional (3D) microdevices of ZrO2‐toughened Al2O3 (ZTA) were fabricated using microstereolithography and a subsequent sintering process. Using microstereolithography, 3D green bodies could be formed from a 40 vol% ZTA ceramic–resin paste. After sintering, the fabricated 3D devices are converted into dense ceramic devices without deformation. In this study, a gear (with a tooth edge of 25 μm) and a photonic crystal (with a lattice constant of 500 μm) were designed and fabricated. The dimensional accuracy of the fabrication process is within 20 μm and the sintering shrinkage is around 26% for these microdevices. The relative density of the sintered ZTA ceramics reached 96.5% of theoretical value. The measured hardness and toughness were about 14 GPa and 11 MPa m1/2, respectively, in both the top and side surfaces. A band gap between 320 and 420 GHz was observed in the ZTA photonic crystal. The microstereolithography process can be easily applied to other ceramic materials and devices.
TI - Fabrication and Characterization of Three‐Dimensional ZrO 2 ‐Toughened Al 2 O 3 Ceramic Microdevices
JF - International Journal of Applied Ceramic Technology
DO - 10.1111/j.1744-7402.2008.02211.x
DA - 2008-07-01
UR - https://www.deepdyve.com/lp/wiley/fabrication-and-characterization-of-three-dimensional-zro-2-toughened-5rbIAPwjDg
SP - 353
VL - 5
IS - 4
DP - DeepDyve
ER -