TY - JOUR
AU - Ito, Seiichi
AB - A raster scanning laser pattern generation system for imaging printed circuit board (PCB) master artwork has been developed. The system can generate a master artwork image up to 600 mm (fast scanning direction) by 650 mm (slow scanning direction) in size at a 370 cm2/min. imaging speed, guaranteeing ±20 pm feature location accuracy in the whole imaging area. Introduction of this system to the master artwork imaging process is expected to result in a dramatic effect realizing an imaging time reduction by a factor of ten on the average and by a factor of more than thirty on large scale and high circuit density master artwork, even when time for data handling is taken into account.
TI - Laser Pattern Generation System
JF - Proceedings of SPIE
DO - 10.1117/12.935263
DA - 1983-10-26
UR - https://www.deepdyve.com/lp/spie/laser-pattern-generation-system-5k06WvnMF5
SP - 141
EP - 149
VL - 396
IS - 
DP - DeepDyve
ER -