TY - JOUR
AU - Lee, YunWoo
AB - We present a method of aspheric surface profile measurement based on the principle of curvature sensor, which measures the curvature of subaperture topography along a line and then reconstructs the entire profile from the measured local curvature data. The subaperture topography is obtained by using white-light scanning interferomtery to avoid the optical alignment error along an optical axis. Test measurement results demonstrate that the proposed method and system is well suited for the aspheric surface profile measurement.
TI - Aspheric measurement based on the curvature sensing method
JF - Proceedings of SPIE
DO - 10.1117/12.734117
DA - 2007-09-13
UR - https://www.deepdyve.com/lp/spie/aspheric-measurement-based-on-the-curvature-sensing-method-5U7yiv0y3q
SP - 667119
EP - 667119-8
VL - 6671
IS - 1
DP - DeepDyve
ER -