TY - JOUR
AU1 - Dayton, David C.
AU2 - Gonglewski, John D.
AB - We have conducted laboratory experiments and measurements to characterize an OKO Technologies membrane mirror. In this paper, we describe a closed-loop demonstration system built around the OKO mirror.
TI - Closed-loop control of a micromachined membrane mirror
JF - Proceedings of SPIE
DO - 10.1117/12.371323
DA - 1999-12-10
UR - https://www.deepdyve.com/lp/spie/closed-loop-control-of-a-micromachined-membrane-mirror-53T20LEAWt
SP - 183
EP - 191
VL - 3866
IS - 1
DP - DeepDyve
ER -