TY - JOUR
AU - Avramov, I D
AB - This paper presents a practical non-destructive method for studying the film coating behavior of SAW devices by using a water soluble dielectric film (manitol) deposited on the SAW device surface by resistive evaporation. After measuring the electrical parameters of the film coated SAW device, the film can easily be removed from its surface by water rinsing without causing any damage to it. The SAW device can then be used over and over again in a large number of film depositions. The method was tested on a 1 GHz surface transverse wave (STW) resonator coated with manitol of varying thickness. After each coating and evaluation, the STW device was successfully recovered without significant performance degradation. Data is presented on the electrical changes of the STW device as a result of depositing manitol coatings of various thicknesses.
TI - Method for nondestructive testing of the film coating behavior of surface acoustic wave (SAW) sensors
JF - Journal of Physics: Conference Series
DO - 10.1088/1742-6596/223/1/012042
DA - 2010-04-01
UR - https://www.deepdyve.com/lp/iop-publishing/method-for-nondestructive-testing-of-the-film-coating-behavior-of-4SPY79zlxP
SP - 012042
VL - 223
IS - 1
DP - DeepDyve
ER -