TY - JOUR
AU1 - Shtern, M. Yu.
AU2 - Sherchenkov, A. A.
AU3 - Shtern, Yu. I.
AU4 - Rogachev, M. S.
AU5 - Korchagin, E. P.
AB - Methods are proposed and criteria are established for preparing the surface of nanostructured thermoelectric materials for the deposition of thin- and thick-film ohmic contacts. The parameters of the mechanical and chemical methods of thermoelectric material surface treatment before the deposition of the contact. The roughness and morphology of the surface of thermoelectric material samples and the films obtained are studied. The criteria and optimal values of the surface roughness of thermoelectric materials are established. The conditions of obtaining thin- and thick-film contacts are determined. Thin-film contacts (thickness up to 300 nm) are obtained by the magnetron sputtering of Ni. Thick-film contacts are formed by the chemical and electrochemical deposition of Ni. The obtained films contain various amounts of Ni. The electrical resistivity of the Ni films obtained by chemical deposition is significantly higher than that of Ni films obtained by electrochemical deposition. The specific contact resistance of the metal–thermoelectric material system in the case of the deposition of Ni films by magnetron sputtering is the smallest among the considered samples. In the case of forming contacts by chemical deposition, it is comparable to that for Ni films formed by electrochemical deposition. The adhesion strength of Ni films obtained by various methods has high values exceeding the industry standard for film coatings in microelectronics. All obtained ohmic contacts satisfy the requirements for the construction of efficient thermoelements in terms of electrical properties and adhesion strength.
TI - Preparation of the Thermoelement Surfaces and Investigation of Ohmic Film Contacts Formed on Them by Different Methods
JF - Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques
DO - 10.1134/s1027451023060186
DA - 2023-12-01
UR - https://www.deepdyve.com/lp/springer-journals/preparation-of-the-thermoelement-surfaces-and-investigation-of-ohmic-3ND2NeebsY
SP - 1207
EP - 1216
VL - 17
IS - 6
DP - DeepDyve
ER -