TY - JOUR
AU - Sommer, Elisabeth
AB - Linear evaporation sources for substrates of up to 400 × 470 mm2 have been developed. The thermal load on the substrate during deposition has been reduced and the influence of different grain sizes has been analyzed. Automatic rate control gave stable deposition rate over three days. For full‐color OLED production a mask alignment system for the vertical inline deposition technology has been developed. The system handles substrate sizes of 370×470 mm2 and achieves a precision of better than +/− 5 μm. Mask cleaning is carried out in vacuum for long mask life and process stability.
TI - 30.4: Vertical Inline Deposition Technology for Full‐Color OLED Production
JF - Sid Symposium Digest of Technical Papers
DO - 10.1889/1.2036218
DA - 2005-05-01
UR - https://www.deepdyve.com/lp/wiley/30-4-vertical-inline-deposition-technology-for-full-color-oled-2l84AmC2p8
SP - 1204
VL - 36
IS - 1
DP - DeepDyve
ER -