TY - JOUR AU - Johguchi, Koh AB - This paper presents a wearable perspiration-monitoring system that includes an improved humidity capacitive meter, poly-di-methyl siloxane (PDMS) micro-flow path, and micro blower driver integrated on a custom chip fabricated with a 0.18 μm BCD process and mounted on a flexible board. The improved humidity meter is up to 250 times more accurate than the previous design and with low-power operation. The micro blower driver can blow air sufficiently and regulate the flow rate. The micro air-flow path was fabricated with a PDMS material, resulting in miniaturization and flexibility. The effectiveness of our developed perspiration-monitoring system has been verified through an experiment and demonstration. TI - Flexible and compact perspiration-monitoring system with 0.18 μm BCD process and PDMS micro air-flow path JO - Japanese Journal of Applied Physics DO - 10.35848/1347-4065/acb659 DA - 2023-04-01 UR - https://www.deepdyve.com/lp/iop-publishing/flexible-and-compact-perspiration-monitoring-system-with-0-18-m-bcd-2G9uc1DKXZ VL - 62 IS - SC DP - DeepDyve ER -