TY - JOUR
AU - Kondow, Masahiko
AB - We describe a device for inter-chip or intra-chip optical communications that contains the Circular Defect in photonic crystal (CirD) lasers array driven by vertical current injection. In order to improve the conductivity of the structure while also preventing current leakage, we introduce the oblique deposition of electrodes on a photonic crystal pattern by using an electron beam evaporation apparatus. The performance of an electrode is investigated by a transmission line method, and the CirD structure is fabricated with the electrode. We analyze the voltage-current relationship and confirm the CirD structure’s low resistance of under 1 kΩ.
TI - Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection
JF - Applied Sciences
DO - 10.3390/app10238377
DA - 2020-11-25
UR - https://www.deepdyve.com/lp/multidisciplinary-digital-publishing-institute/oblique-deposition-of-ti-pt-au-electrode-on-photonic-crystal-for-10DiXpUhtY
SP - 8377
VL - 10
IS - 23
DP - DeepDyve
ER -