TY - JOUR
AU - Gorczyca, Thomas B.
AB - A photo patterned fabrication process for manufacture of passive polymer composite waveguide structures and devices is presented. The process takes advantage of compatibility between certain polymer/high vapor pressure monomer blends and their refractive index differences to directly photo define passive waveguide structures. With suitable catalysts, monomers present in the composite blend are polymerized in exposed areas, while allowed to evaporate in unexposed areas during a post exposure bake. Areas thus produced will have a different composition (i.e. refractive index) in exposed vs. unexposed areas and different thickness due to reactant loss. Composite blends will be presented which provide for photo defining waveguide core regions in either the exposed areas or unexposed areas of a processed thin film. Critical to quality material properties evaluated include refractive index contrast, optical transmission, dielectric properties and multilayer capability. The material and processes developed are found to be compatible with potential fabrication of a high density integrated hybrid optoelectronic module that requires laser via processablity, high temperature capability and planar processing. Extensions to the fabrication processes will be discussed including use of control over surface topography and refractive index contrast to manufacture additional photonic devices such as micro lenses.
TI - Photo-defined polymeric photonic materials and processes
JF - Proceedings of SPIE
DO - 10.1117/12.504749
DA - 2003-12-16
UR - https://www.deepdyve.com/lp/spie/photo-defined-polymeric-photonic-materials-and-processes-0xwb2m0QD6
SP - 97
EP - 104
VL - 5179
IS - 1
DP - DeepDyve
ER -