TY - JOUR
AU - Tabrizian, Roozbeh
AB - Wireless communication through dynamic spectrum allocation is essential to accommodate increasing data traffic. This requires massive arrays of radiofrequency filters for adaptive signal shaping at arbitrary frequencies. However, it is difficult to create massively integrated arrays using conventional filters based on planar acoustic resonators due to their large footprint and limited on-chip frequency scalability or intrinsic configurability. Here, we report a three-dimensional ferroelectric-gate fin nano-acoustic resonator that can be used to make spectral processors with high-frequency tailorability, large-scale and dense integrability, and intrinsic switchability. The ferroelectric-gate fins are created by growing atomic-layered ferroelectric hafnia-zirconia transducers on silicon nano-fins. The resonator generates bulk acoustic modes with scalable frequencies over 3–28 GHz (defined lithographically by the fin width) and provides a frequency–quality–electromechanical coupling product (f × Q × kt2) of 19.4 × 1010 Hz (at around 11 GHz). The voltage-controlled tuneability of the gate-transducer polarization also enables intrinsic configurability without the need for external switches. We used the approach to create a monolithic filter array, created by electrical coupling of ferroelectric-gate fins implemented on a single die, covering 9–12 GHz, providing dynamic configurability of the active passband and an isolation as large as 17 dB.
TI - A ferroelectric-gate fin microwave acoustic spectral processor
JF - Nature Electronics
DO - 10.1038/s41928-023-01109-5
DA - 2024-02-01
UR - https://www.deepdyve.com/lp/springer-journals/a-ferroelectric-gate-fin-microwave-acoustic-spectral-processor-0sAtwMTB7E
SP - 147
EP - 156
VL - 7
IS - 2
DP - DeepDyve
ER -