TY - JOUR
AU - Syomochkin, A I
AB - The article presents the optical spectroscopy results of molybdenum disulfide ultrathin films deposited on Si substrates by the methods of direct current (DCMS) and pulsed (PMS) magnetron sputtering MoS2 target in vacuum, and also at flow deposition under the influence of external magnetic field on the substrate. Furthermore, the article revues the results of optical bandgap calculation for all samples of MoS2 thin films.
TI - Investigation of MoS2 ultrathin films formed by physical vapor deposition in vacuum
JF - IOP Conference Series Materials Science and Engineering
DO - 10.1088/1757-899X/781/1/012020
DA - 2020-04-01
UR - https://www.deepdyve.com/lp/iop-publishing/investigation-of-mos2-ultrathin-films-formed-by-physical-vapor-0rsIoSUiMC
SP - 012020
VL - 781
IS - 1
DP - DeepDyve
ER -