TY - JOUR
AU - Kalugin, V. V.
AB - A construction and the action principle of the sensor of the form and position of the light beam is described. On the basis of the two such sensors there has been constructed an apparatus for measuring profiles and roughness of the quasi-mirror surfaces. The inhomogeneities detection was realized by the change of the energy center position of the beam and its form, the beam being reflected from the examined surface. The measurements results are appendixed.
TI - Noninterference method of optical surface roughness measurements
JF - Proceedings of SPIE
DO - 10.1117/12.192001
DA - 1994-10-31
UR - https://www.deepdyve.com/lp/spie/noninterference-method-of-optical-surface-roughness-measurements-0qx04NtJRw
SP - 40
EP - 44
VL - 2113
IS - 1
DP - DeepDyve
ER -