TY - JOUR
AU - Tver’yanovich, Yu. S.
AB - The process of the formation of diamond-like carbon films on the surface of monocrystalline silicon is studied. The film is formed as a result of the plasma-chemical decomposition of hydrocarbons (propane, butane) and subsequent annealing in a vacuum. The carbon film is formed in the form of diamond-like nanoparticles with a diameter of about 8 nm. Silicon–carbon bonds are formed at the boundary of the silicon substrate and the carbon film, which ensures strong adhesion.
TI - Formation of Diamond-Like Carbon Films by the Plasma-Chemical Decomposition of Hydrocarbons
JO - Glass Physics and Chemistry
DO - 10.1134/s1087659624600728
DA - 2024-06-01
UR - https://www.deepdyve.com/lp/springer-journals/formation-of-diamond-like-carbon-films-by-the-plasma-chemical-0eRjXNlI5c
SP - 222
EP - 226
VL - 50
IS - 3
DP - DeepDyve
ER -